传感器和馈入件
前装式双传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 前装式双晶体传感器拥有经实践检验的可靠性和耐用性，提供超越当前市场上的任何传感器头的最佳热稳定性。双传感器可提供备用晶体，这对于真空腔室中需要有第二个晶体的关键过程至关重要。
由于采用前装式设计，可以在缺少侧面插入空间的应用中轻松地插入晶体支架。经机械装配而成，而不是焊接在一起，因此，您能够在现场方便地更换其部件（如有必要）。传感器可单独订购，或以传感器/馈入件组合的形式订购，该组合可焊接在一起，或通过压缩接头装配在一起。
功能
- 双晶体
- 晶体闸
- 前装式晶体支架
- 易于安装
- 随附 2.54 cm (1 in.) 螺栓馈入装置及 CF40 馈入装置
- 在配有压缩接头时可调长度
- 在配有压缩接头或焊接到馈入件时无需铜焊
- 焊接为客户指定长度的传感器/馈入装置组合
规格
| 最小水流时的最高工作等温环境温度 | 400 ° C |
| 晶体交换 | Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders. |
| 水管 | S-304, 0.125 in. (3.175 mm) OD x 0.015 in. (0.381 mm) Wall thickness seamless stainless steel tubing |
| 1 in. 螺栓和 Ultra-Torr（压缩接头）端接的馈入件规格： | |
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® |
| 温度 | Operational environment to 300ºC with water cooling or 165° C without |
| 安装 | 1.015 in. ±0.010 in. diameter aperture |
附件
Accessories
Consumables
| Name | Description |
| QCM Sensor Feedthroughs | QCM Sensor Feedthroughs |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
| Part Number | Description |
| 007-007 | Retainer spring (for crystal holder) |
| 007-023 | Ceramic Retainer |
| 080-018 | Set screw (for female coax) |
| 082-044 | Teflon screw (for leaf spring) |
| 750-115-P4 | Coupling (installs onto bellows assembly) |
| 750-169-P2 | Bellows assembly (coupling not included) |
| 750-171-P1 | Finger spring contact |
| 750-172-G1 | Crystal holder (includes retainer spring) |
| 750-174-P2 | Female coax |
| 750-175-P1 | Insulator (underneath leaf spring) |
| 008-007 | CRYSTAL SNATCHER |
| 750-188-P3 | Leaf Spring |
| 750-210-G1 | Shutter module (bellows assembly, shaft assembly, and shutter assembly) |
| 750-215-G1 | Shaft assembly (part of shutter module) |
| 750-216-G1 | Shutter assembly (part of shutter module) |
| In-vacuum cables | |
| 321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
| 007-252 | In-vacuum cable, 30.5 cm (12 in.) |
| 321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
| 007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
| 007-059 | In-vacuum cable, 91.4 cm (36 in.) |
| 007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
| 321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
| 321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
| 321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
| 321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
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