传感器和馈入件

CrystalSix® 传感器

CrystalSix-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON CrystalSix 晶体对于要求连续监控速率的长时间过程非常重要。CrystalSix 传感器在一个传感器头中含有 6 颗石英监控器晶体,为 OLED、MBE、太阳能、长时间光学镀膜或其他需要长时间腔室排气的过程提供安全性。与 INFICON 薄膜沉积监控器结合使用时,CrystalSix 在当前晶体失效或不稳定的情况下,会自动将新的晶体转动到适当的位置。晶体更换是自动完成的,不会中断您的过程,支持持续监控沉积速率。

晶体索引通过气动机制完成。相比同类装置使用的昂贵的真空发热电机,这种气动马达可提供更好的晶体热稳定性。一个 8 英寸的水冷却管保持传感器头的热稳定性,并提供晶体位置的灵活性。

与某些 INFICON 薄膜控制器结合使用时,传感器提供位置反馈,因此可针对特定的材料安排特定的位置。

功能

  • 装有 6 颗晶体,可进行可靠的自动转换,从而最大限度延长过程运行时间
  • 晶体转换由空气驱动完成(竞争产品是使用生热电机),因而晶体温度非常稳定
  • 1/8" 管保持热稳定性,并提供传感器放置的灵活性
  • 提供可选晶体闸

规格

无水时的最高烘烤温度130°C
最小水流时的最高工作等温环境温度400° C
晶体交换Front-loading, extraction tool required (supplied with unit)
水管和空气管S-304, 0.125 in. (0.32 cm) O.D. x 0.016 in. (0.04 cm) Wall Thickness 30 in. Long (76 cm) seamless stainless steel tubing
在此下载完整的规格

零件编号

Part NumberDescription
750-446-G1CrystalSix sensor (sensor only, no feedthrough included)

附件

Accessories
Consumables
Spare Parts
NameDescription
QCM Sensor FeedthroughsQCM Sensor Feedthroughs
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
Part NumberDescription
007-007Retainer spring (for crystal holder)
007-023Ceramic Retainer
070-0170#2 Lockwasher (part of heat shield assembly)
070-0398Retaining ring (secures bearing located next to pawl and actuator stem)
070-0777Compression spring (on carousel shaft)
070-0778Ball bearing (underneath carousel)
070-0779Ball bearing
070-0870Teflon washer (on carousel shaft)
070-0877Shim spacer (part of heat shield assembly)
070-0879Bearing (at center of top plate weld assembly)
073-114Wire .022 in. x 1.06 in (clamps heat shield retaining pin)
082-026# 2-56 Nut (part of heat shield assembly)
750-048-P1Retainer spring for 007-048 and 751-619-G1 sputtering head bodies
750-175-P1Insulator (underneath leaf spring)
750-188-P3Leaf Spring
750-249-P2Retaining pin (part of heat shield assembly)
750-250-G1Deposition Shield, CrystalSix Sensor
750-256-P2Extension spring
750-257-P3Corrugated spring 4.40 in. (11.2 cm)
750-261-G1Carousel assembly (includes resistor network and electrical contacts)
750-262-G1Crystal holder
750-265-G1Top plate weld assembly
750-276-P2Actuator cover
750-278-P2Water line
750-286-P2Pneumatic actuator
750-290-P3Carousel electrical contacts (set of eight)
750-901-G1Crystal 6 Kit
750-293-P2Ratchet
750-294-P2Stop ratchet
750-295-G1Pawl and actuator
750-336-G1Resistor network assembly
750-338-P1Contact insulator (underneath carousel electrical contacts)
In-vacuum cables 
321-039-G12In-vacuum cable, 15.2 cm (6 in.)
007-252In-vacuum cable, 30.5 cm (12 in.)
321-039-G11In-vacuum cable, 61.0 cm (24 in.)
007-044In-vacuum cable, 78.1 cm (30.75 in.)
007-059In-vacuum cable, 91.4 cm (36 in.)
007-061In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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