传感器和馈入件

炫酷抽屉单传感器

Cool-Drawer-Single-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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炫酷抽屉单传感器允许晶体从侧面安装到传感器中,为没有足够的空间从前面安装晶体的系统提供了便利。炫酷抽屉单传感器采用炫酷抽屉晶体支架,该晶体支架通过水冷式外壳进行热屏蔽,可确保卓越的晶体性能。

功能

  • 无内部电缆
  • 炫酷抽屉晶体支架
  • 易于安装
  • 在配有焊接式 CF40 法兰时可烘烤
  • CF40 馈入装置和 2.54 cm (1") 螺栓馈入装置
  • 在配有压缩接头时可调长度
  • 在配有压缩接头时无需铜焊
  • 焊接为客户指定长度的传感器/馈入装置组合

规格

冷却水Minimum water flow of 150 to 200 cm³/min using 1/8 in. O.D. tube, 30°C max. (Do not allow to freeze)
表面加工304 stainless steel, Teflon, ceramic, beryllium nickel
1 in. 螺栓和压缩接头端接:
 TemperatureOperational environment to 300° C with water cooling or 165° C without
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附件

Accessories
Consumables
Part NumberDescription
750-420-G1Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
123259Cool Drawer Sensor Crystal Retainer
123260Cool Drawer Sensor Drawer and Retainer Combo
123417Shutter bracket
123418Bellows cover
147207Bellows and cover assembly (Includes all parts marked with *)
147202PSV100 PNEUMATIC VALVE 12 VDC
147403* Actuator
147406* Bellows support
147407* Bellows Cover
147408* Threaded shaft
147411Spacer
147424* Bellows tube
084-026* Hex nut
084-064* Lockwasher
084-205* #4-40 x 3/16 Phillips screw
800128#4 Lockwasher
800371Shoulder Screw
800372Washer
800416* 6-32 x 3/16 in. set screw
803313* Spring
123223-1Conduit Brazed assembly - long pin
123223-2Conduit brazed assembly - short pin
123419Shutter
147206-2* Bellows with 35 in. tube
803102O-ring for 5 port adjustable feedthrough
803261Washer for 5 port adjustable feedthrough
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