ピラニゲージ
PSG50x
ATM To Medium Vacuum Gauge
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バキュームゲージに革命を起こしましょう！
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICONのピラニ標準ゲージ PSG500、PSG502-S、 PSG510-S、 PSG512-Sは、市場において最も進んだデジタルピラニ技術を採用しています。ステンレス製の堅牢なセンサセルやコンパクト設計により、半導体システムでの使用や、補助真空側配管などの一般用途に最適です。
利点
- 操作が簡単な押しボタン式ATMおよびHV調整
- コンパクトで堅牢な設計
- アルミハウジング
- 取付け方向が自在
- 金属封止型のステンレス製測定セル
- 対数出力信号により統合が容易
- 絶対圧10 bar超過用ねじ接続
- 250 °Cでのベーキングが可能なバージョン
- 耐腐食性ニッケルフィラメントをオプションで選択可能
- 腐食性のある作業にはセラミックフィードスルー（PSG510と PSG512)
- オプションのセットポイント
- RoHSコンプライアンス
標準的なアプリケーション
- 高真空電離真空計の制御
- 真空圧力のモニタリング
- 真空システム内の安全回路
- 一般的な真空計測と高真空から低真空までの真空範囲のコントロール
仕様
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | ‒ |
| Hysteresis | % of reading | ‒ |
| Relay contact | ‒ | |
| Relay contact: Switching time | ms | ‒ |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
品番
アクセサリー
スペアパーツ
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8" NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2" Tube |
| 350-064 | PSG500 8-VCR (1/2") |
| 350-065 | PSG500 4-VCR (1/4") |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8" NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2" Tube |
| 350-084 | PSG500-S 8-VCR (1/2") |
| 350-085 | PSG500-S 4-VCR (1/4") |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8" NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2" Tube |
| 350-144 | PSG502-S 8-VCR (1/2") |
| 350-145 | PSG502-S 4-VCR (1/4") |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
| PSG500 tungsten | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500-S tungsten, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG502-S nickel, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500 tungsten | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG500-S tungsten, setpoints | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG502-S nickel, setpoints | |
| 350-900 | PSG502 Spare Sensor DN 16 KF |
| 350-901 | PSG502 Spare Sensor 1/8" NPT |
| 350-902 | PSG502 Spare Sensor DN 16 CF-R |
| 350-903 | PSG502 Spare Sensor 1/2" Tube |
| 350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
| 350-905 | PSG502 Spare Sensor 7/16-20 UNF |
| 350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
| 350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
| 350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-930 | PSG510 Spare Sensor DN 16 KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-940 | PSG512 Spare Sensor DN 16 KF |
ダウンロード
取扱説明書
3Dファイル
350-060 PSG500 DN 16 ISO-KF
zip
•
195,3 KB
•
3Dファイル
350-061 PSG500 1/8" NPT
zip
•
271,2 KB
•
3Dファイル
350-062 PSG500 DN 16 CF-R
zip
•
284,1 KB
•
3Dファイル
350-063 PSG500 1/2" tube
zip
•
265,9 KB
•
3Dファイル
350-064 PSG500 8 VCR®
zip
•
279,6 KB
•
3Dファイル
350-065 PSG500 4 VCR®
zip
•
278,4 KB
•
3Dファイル
350-066 PSG500 7/16-20 UNF
zip
•
277,9 KB
•
3Dファイル
350-067 PSG500 DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-068 PSG500 DN 16 CF-R long tube
zip
•
295,4 KB
•
3Dファイル
350-072 PSG500 G1/8"
stp
•
2,2 MB
•
3Dファイル
350-080 PSG500-S DN 16 ISO-KF
zip
•
319,0 KB
•
3Dファイル
350-081 PSG500-S 1/8" NPT
zip
•
342,8 KB
•
3Dファイル
350-082 PSG500-S DN 16 CF-R
zip
•
355,3 KB
•
3Dファイル
350-083 PSG500-S 1/2" tube
zip
•
337,7 KB
•
3Dファイル
350-084 PSG500-S 8 VCR®
zip
•
351,4 KB
•
3Dファイル
350-085 PSG500-S 4 VCR®
zip
•
350,3 KB
•
3Dファイル
350-086 PSG500-S 7/16-20 UNF
zip
•
349,7 KB
•
3Dファイル
350-087 PSG500-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-088 PSG500-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3Dファイル
350-140 PSG502-S DN 16 ISO-KF
zip
•
295,4 KB
•
3Dファイル
350-141 PSG502-S 1/8" NPT
zip
•
342,8 KB
•
3Dファイル
350-142 PSG502-S DN 16 CF-R
zip
•
355,3 KB
•
3Dファイル
350-143 PSG502-S 1/2" tube
zip
•
337,7 KB
•
3Dファイル
350-144 PSG502-S 8 VCR®
zip
•
351,4 KB
•
3Dファイル
350-145 PSG502-S 4 VCR®
zip
•
350,3 KB
•
3Dファイル
350-146 PSG502-S 7/16-20 UNF
zip
•
349,7 KB
•
3Dファイル
350-147 PSG502-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-148 PSG502-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3Dファイル