冷陰極ゲージ
MAG470
倒立型マグネトロンゲージ
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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倒立型マグネトロン真空計MAG470は、あらゆる超高真空アプリケーションに対応します。測定範囲は5x10-11mbarから1x10-2mbarです。
利点
- フィラメントの焼損なし
- 拡張バージョン、センサーベークアウト250℃まで
- 優れた着火性
- 洗浄が容易
- 金属密封フィードスルー
- 高電圧用LEDインジケーター
- 対数アナログ出力信号
標準的なアプリケーション
- 超高真空圧力監視
- 蒸着・スパッタリング装置用基準圧力
- 中高真空領域における一般的な真空計測・制御
仕様
MAG470
MAG470 extended
| Measurement range (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| Accuracy | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| Repeatability | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| Temperature | ||
| Operation (ambient) | °C | +5 ... +55 |
| Storage | °C | -40 ... +65 |
| Bake-out | °C | 250 1) |
| Supply voltage | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | |
| (1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable | ||
| Measurement range (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| Accuracy | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| Repeatability | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| Temperature | ||
| Operation (ambient) | °C | +5 ... +55 |
| Storage | °C | -40 ... +65 |
| Bake-out | °C | 250 2) |
| Supply voltage | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | |
| (1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable | ||
品番
アクセサリー
スペアパーツ
| MAG470 | |
| 品番 | 商品説明 |
| 399-360 | MAG470 DN 40 CF-F, FCC |
| MAG470 extended | |
| 品番 | 商品説明 |
| 399-361 | MAG470 DN 40 CF-F, extendet |
| MAG470 | |
| 品番 | 商品説明 |
| 351-023 | Magnetic shield |
| MAG470 extended | |
| 品番 | 商品説明 |
| 351-023 | Magnetic shield |
| MAG470 | |
| 品番 | 商品説明 |
| 351-997 | MPG401 Maintenance set |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| MAG470 extended | |
| 品番 | 商品説明 |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| 351-997 | MPG401 Maintenance set |
