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INFICON Quantus® HP100

15 3月 2023 | 13:00 - 14:00
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開催場所
Online
言語
English
スピーカー
Huidong Zang
期間
1 hour

Description

A Newly Developed Optical Gas Analyzer for Semiconductor Manufacturing

This webinar will present an overview of the newly developed optical gas analyzer, Quantus HP100, based on self-plasma optical emission spectroscopy technology.

As a sister gas analyzer for the market-proven Quantus LP100 under the INFICON optical sensor portfolio, Quantus HP100 provides unparalleled performance to many critical semiconductor applications, such as leak detection, endpoint detection and gas analysis.  

It has a much broader operational pressure range - up to 450 Torr without a pumping system - and it boosts the detection limit down to sub-ppm level. 

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詳細情報
https://www.inficon.com/admin/#/articles/en/webinar/da294c5c-fb6e-40da-9b44-c6a7384e40e9