Pirani Gauges
PSG50X ATM~중간진공 게이지
INFICON 피라니 표준 게이지인 PSG500, PSG502-S, PSG510-S, PSG512-S에는 시장에서 제공되는 최첨단 디지털 피라니 기술이 적용되어 있습니다.
드롭인 옵션
진공 측정기 경험을 혁신하세요!
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
INFICON 피라니 표준 게이지인 PSG500, PSG502-S, PSG510-S, PSG512-S에는 시장에서 제공되는 최첨단 디지털 피라니 기술이 적용되어 있습니다. 견고한 스테인리스 스틸 센서 셀 및 소형 디자인 덕분에 반도체 시스템에 사용하거나 전면 진공 라인 등의 표준 적용개소에 사용하기에 적합합니다.
장점
- 간단한 푸시 버튼 ATM 및 HV 조정
- 공간 절약형의 견고한 디자인
- 알루미늄 하우징
- 모든 방향으로 장착 가능
- 금속 씰링 피드스루가 있는 스테인레스강 측정 셀
- 로그 신호 출력으로 손쉬운 통합
- 나사산 연결부가 있는 10 bar 절대 과압
- 250°C 베이크 가능 버전
- 부식성 분야를 위한 니켈 필라멘트 옵션
- 부식성이 매우 강한 분야에 적합한 세라믹 피드스루(PSG510 및 PSG512)
- 셋포인트 옵션
- RoHS 준수
일반적인 응용 분야
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
사양서
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | ‒ |
| Hysteresis | % of reading | ‒ |
| Relay contact | ‒ | |
| Relay contact: Switching time | ms | ‒ |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
Part Number
Accessories
Spare Parts
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8" NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2" Tube |
| 350-064 | PSG500 8-VCR (1/2") |
| 350-065 | PSG500 4-VCR (1/4") |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8" NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2" Tube |
| 350-084 | PSG500-S 8-VCR (1/2") |
| 350-085 | PSG500-S 4-VCR (1/4") |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8" NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2" Tube |
| 350-144 | PSG502-S 8-VCR (1/2") |
| 350-145 | PSG502-S 4-VCR (1/4") |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
| PSG500 tungsten | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500-S tungsten, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG502-S nickel, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500 tungsten | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG500-S tungsten, setpoints | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG502-S nickel, setpoints | |
| 350-900 | PSG502 Spare Sensor DN 16 KF |
| 350-901 | PSG502 Spare Sensor 1/8" NPT |
| 350-902 | PSG502 Spare Sensor DN 16 CF-R |
| 350-903 | PSG502 Spare Sensor 1/2" Tube |
| 350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
| 350-905 | PSG502 Spare Sensor 7/16-20 UNF |
| 350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
| 350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
| 350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-930 | PSG510 Spare Sensor DN 16 KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-940 | PSG512 Spare Sensor DN 16 KF |
다운로드
매뉴얼
3D 파일
350-060 PSG500 DN 16 ISO-KF
zip
•
195,3 KB
•
3D 파일
350-061 PSG500 1/8" NPT
zip
•
271,2 KB
•
3D 파일
350-062 PSG500 DN 16 CF-R
zip
•
284,1 KB
•
3D 파일
350-063 PSG500 1/2" tube
zip
•
265,9 KB
•
3D 파일
350-064 PSG500 8 VCR®
zip
•
279,6 KB
•
3D 파일
350-065 PSG500 4 VCR®
zip
•
278,4 KB
•
3D 파일
350-066 PSG500 7/16-20 UNF
zip
•
277,9 KB
•
3D 파일
350-067 PSG500 DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-068 PSG500 DN 16 CF-R long tube
zip
•
295,4 KB
•
3D 파일
350-072 PSG500 G1/8"
stp
•
2,2 MB
•
3D 파일
350-080 PSG500-S DN 16 ISO-KF
zip
•
319,0 KB
•
3D 파일
350-081 PSG500-S 1/8" NPT
zip
•
342,8 KB
•
3D 파일
350-082 PSG500-S DN 16 CF-R
zip
•
355,3 KB
•
3D 파일
350-083 PSG500-S 1/2" tube
zip
•
337,7 KB
•
3D 파일
350-084 PSG500-S 8 VCR®
zip
•
351,4 KB
•
3D 파일
350-085 PSG500-S 4 VCR®
zip
•
350,3 KB
•
3D 파일
350-086 PSG500-S 7/16-20 UNF
zip
•
349,7 KB
•
3D 파일
350-087 PSG500-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-088 PSG500-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D 파일
350-140 PSG502-S DN 16 ISO-KF
zip
•
295,4 KB
•
3D 파일
350-141 PSG502-S 1/8" NPT
zip
•
342,8 KB
•
3D 파일
350-142 PSG502-S DN 16 CF-R
zip
•
355,3 KB
•
3D 파일
350-143 PSG502-S 1/2" tube
zip
•
337,7 KB
•
3D 파일
350-144 PSG502-S 8 VCR®
zip
•
351,4 KB
•
3D 파일
350-145 PSG502-S 4 VCR®
zip
•
350,3 KB
•
3D 파일
350-146 PSG502-S 7/16-20 UNF
zip
•
349,7 KB
•
3D 파일
350-147 PSG502-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-148 PSG502-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D 파일
