Cold Cathode Gauges

MAG470

Inverted Magnetron Gauges

MAG470

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. The measurement range is from 5x10-11 mbar to 1x10-2 mbar.

장점

  • No filament to burn out
  • Extended version, sensor bakeout up to 250°C
  • Excellent ignition properties
  • Easy to clean
  • Metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

일반적인 응용 분야

  • Ultra high vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range

사양서

MAG470
MAG470 extended
Measurement range (air, N2)mbar
Torr
5x10-11 … 1x10-2
3.8x10-11 … 7.5x10-3
Accuracy  
1x10-9 ... 1x10-3 mbar% of reading≈±30
Repeatability  
1x10-9 ... 1x10-3 mbar% of reading≈±5
Temperature  
Operation (ambient)°C+5 ... +55
Storage°C-40 ... +65
Bake-out°C250 1)
Supply voltage  
At gaugeV (dc)+15 ... +30
At supply unit with max. cable length (3)V (dc)+16 ... +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum Stainless steel, Al2O3, Ag
   
(1) Without electronics magnetic shielding
(2) 250°C in defined area, see dimension
(3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable
Measurement range (air, N2)mbar
Torr
5x10-11 … 1x10-2
3.8x10-11 … 7.5x10-3
Accuracy  
1x10-9 ... 1x10-3 mbar% of reading≈±30
Repeatability  
1x10-9 ... 1x10-3 mbar% of reading≈±5
Temperature  
Operation (ambient)°C+5 ... +55
Storage°C-40 ... +65
Bake-out°C250 2)
Supply voltage  
At gaugeV (dc)+15 ... +30
At supply unit with max. cable length (3)V (dc)+16 ... +30
RippleV (p-p)≤1
Power consumptionW≤2
Materials exposed to vacuum Stainless steel, Al2O3, Ag
   
(1) Without electronics magnetic shielding
(2) 250°C in defined area, see dimension
(3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable
전체 사양 다운로드
Part Number
Accessories
Spare Parts
MAG470
Part NumberDescription
399-360MAG470 DN 40 CF-F, FCC
  
MAG470 extended
Part NumberDescription
399-361MAG470 DN 40 CF-F, extendet
MAG470
Part NumberDescription
351-023Magnetic shield
  
MAG470 extended
Part NumberDescription
351-023Magnetic shield
MAG470
Part NumberDescription
351-997MPG401 Maintenance set
351-990Repair set IKR 060/070/26x/270 MAG470
351-995MxG40x/50x Spare parts ignition aid (10)
351-994MPG40x Ignition tool set
  
MAG470 extended
Part NumberDescription
351-990Repair set IKR 060/070/26x/270 MAG470
351-995MxG40x/50x Spare parts ignition aid (10)
351-994MPG40x Ignition tool set
351-997MPG401 Maintenance set
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