IMM-100

用精确的速率和厚度监测来保护和增加您的利润

IMM-100是一款采用ModeLock技术的沉积监控器，可以最大限度地提高再现性和均匀性，具有最高的厚度精度、最佳的测量分辨率和最低的速率噪声。

由于内置了振荡器，IMM-100可以很容易地集成到EtherCAT系统中，而且硬件和占地面积最小。这个强大而精确的测量监控器一定会给您的工艺带来新的性能水平。

传感器输入	1

测量频率范围	6.0 to 4.5 MHz (固定)

速率和厚度分辨率	0.0042埃（新晶体）；0.0076埃（晶体@4.5兆赫），超过100毫秒的样品，材料密度=1.0，Z-比率=1.0

通信类型	EtherCAT，2个RJ45插口，支持数据菊花链。通过开关明确的设备ID

零件编号

附件

易耗品

零件编号	描述
785-200-G1	IMM-100 Unit
785-600-G1	IMM-100 Thin Film Deposition Monitor

零件编号	描述
Optional Power Supplies	The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1	Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6	Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
961-021-G7	Power Supply Kit IL 240V
961-021-G8	Power Supply Kit IL 4.5 M Extension
961-021-G9	Power Supply Kit IL 9.0 M Extension
961-021-G10	Power Supply Kit UK 240V
961-021-G11	Power Supply Kit UK 4.5 M Extension
961-021-G12	Power Supply Kit UK 9.0 M Extension
Optional Mounting Bracket
785-202-G1	Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1	Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
Optional Communications Cable
600-1190-P1	ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2	SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4	ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8	Ethernet 7m cable
600-1190-P15	Ethernet 15m cable

命名	描述
Quartz Monitor Crystals	Quartz Monitor Crystals

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