热电离真空计
BPG400
大气压至超高真空真空计

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
INFICON Bayard-Alpert 皮拉尼复合真空计 BPG400 将 Bayard-Alpert 和皮拉尼两种真空计的功能融合入单个紧凑型装置中,测量范围为 5×10-10 mbar至大气压(3.8×10-10 Torr 至大气压)。多项技术相结合降低了安装、设置和集成的复杂性。选择 BPG400 单一经济型封装,在低成本、可重复的过程中进行基础压力测量。
好处
- 从 5 x 10-10 mbar 至大气气压(3.8 x 10-10 Torr 至大气气压)的极其宽泛的测量范围
- 在 10-8 … 10-2 mbar 5% 工艺压力范围内为表现出优秀的重复性
- 皮拉尼联锁保护 Bayard-Alpert 系统在高压操作下丝极过早烧毁和过度污染
- 长使用寿命氧化钇铱丝
- 备有可选的图形显示器和现场总线接口
- 高真空皮拉尼自动调节,减少操作员的干预
- 符合 RoHS 标准
- 低真空至超高真空范围内的一般真空测量和控制
典型应用
- 对半导体过程和传输腔室的压力测量
- 工业镀膜
- 低真空至超高真空范围内的一般真空测量和控制
规格
Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1000 3.8×10-10 … 750 |
Accuracy | ||
10-8 … 10-2 mbar | % of reading | ±15 |
Repeatability | ||
10-8 … 10-2 mbar | % of reading | 5 |
Temperature | ||
Operation (ambient) | °C | 0 … +50 |
Storage | °C | -20 … +70 |
Bakeout at flange with extension | °C | 150 |
Bakeout at flange without extension | °C | 80 |
Bakeout electronics removed | °C | 150 |
Supply voltage | V (dc) A (dc) | +20 … +28 0.8 |
Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
Part Number
Accessories
Spare Parts
Part Number | Description |
353-500 | BPG400 DN 25 ISO-KF |
353-501 | BPG400 LCD, DN 25 ISO-KF |
353-502 | BPG400 DN 40 CF-R |
353-503 | BPG400 LCD, DN 40 CF-R |
353-505 | BPG400-SP PBus, DN 25 ISO-KF |
353-506 | BPG400-SP PBus, DN 40 CF-R |
353-507 | BPG400-SD DNet, DN 25 ISO-KF |
353-508 | BPG400-SD DNet, DN 40 CF-R |
Part Number | Description |
353-511 | Power supply BPG400 24VDC |
353-510 | 100 mm sensor extension tube |
353-512 | Baffle for BPG400 |
211-113 | Centering ring with baffle DN 25 KF |
Part Number | Description |
354-490 | Spare sensor head BPG400, DN 25 ISO-KF |
354-491 | Spare sensor head BPG400, DN 40 CF-R |
354-498 | Spare electronic BPG400 without Display |
354-499 | Spare electronic BPG400 with Display |
下载
手册
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf
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319,1 KB
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德语
TINA03D1 BPG400-xx Gebrauchsanleitung_lang.Web
pdf
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1,1 MB
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德语
TIMA03E1 BPG400xx Operating manual short
pdf
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314,5 KB
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英文
TIMA03D1 BPG400xx Gebrauchsanleitung kurz
pdf
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319,1 KB
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英文
TIMA36E1_BPG400xx operating manual-supplement
pdf
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326,7 KB
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英文
TINA03E1_BPG400-xx operating manual_long
pdf
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1,1 MB
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英文
TIRA03E1 DeviceNet BPG400x Communication Protocol
pdf
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319,3 KB
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英文
TIRA36E1 Profibus BPG400x Communication Protocol
pdf
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399,9 KB
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英文
3D Step Files
352-501 BPG400 with LCD, DN 25 ISO-KF
zip
•
456,8 KB
353-500 BPG400 without LCD, DN 25 ISO-KF
zip
•
449,5 KB
353-502 BPG400 without LCD, DN 40 CF-R
zip
•
427,5 KB
353-503 BPG400 with LCD, DN 40 CF-R
zip
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468,1 KB
353-505 BPG400-SP with Profibus DP, DN 25 ISO-KF
zip
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468,2 KB
353-506 BPG400-SP with Profibus DP, DN 40 CF-R
zip
•
468,2 KB
353-507 BPG400-SD with DeviceNet™, DN 25 ISO-KF
zip
•
457,3 KB
353-508 BPG400-SD with DeviceNet™, DN 40 CF-R
zip
•
462,3 KB
354-490 BPG400 Replacement sensor DN 25 ISO-KF
zip
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48,5 KB
354-491 BPG400 Replacement sensor DN 40 CF-R
zip
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69,2 KB