过程控制 | INFICON

过程控制

FabGuard® Integrated Process Monitor (IPM)

process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer

FabGuard® 集成过程监控器

Run-by-run and real-time analysis for process control and fault finding reduces scrap and improves process control
Automated data collection and storage for historical files to enhance SPC data combined from multiple sensors reduces hardware redundancy while allowing all data from an entire tool, process or fab to be integrated for convenient access and analysis
Single user interface for all tool data reduces learning curve

过程控制

FABGUARD® Explorer

one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases

FabGuard® Explorer

FabGuard Explorer 提供多传感器支持：Transpector MPH RGA、Transpector 2 RGA、RFS100 射频传感器和 Quantus 气体分析仪
真空诊断工具可快速识别真空环境中的气体种类
运行摘要可提供每次运行的完整传感器和数据采集信息，有助于确定传感器参数变化是否会导致数据异常

过程控制

FABGUARD® Tool Recipe Management (RMS)

Helps Semiconductor, Display and Solar manufacturers meet these challenges by providing central archival and management of process equipment recipes.

FabGuard® Tool Recipe Management (RMS)

Custom tool messaging as required by specific tool types
Central repository for process recipes
The same golden recipe can be shared across tools/chambers
Automated or manual recipe verification

过程控制

FABGUARD Analysis Server (AS)

Advanced Modeling, Data Analysis and Visualization Capabilities Made Simple

FabGuard Analysis Server (AS)