제품 및 서비스에 대해 자세히 알아보기
Choosing the Right QCM System for Your Application
About the webinar
In this OnDemand webinar we discuss some common applications in the optical, OLED, and solar industry. We unpack a list of unique key features exclusively offered by INFICON that are tailored to your application
Improving accuracy and repeatability:
- Multi-Layer compensation for high precision optical coatings
- Temperature compensation to eliminate thermal shock effects from thermal source applications
- ModeLock for low rates and thin precision coatings
- Auto-Z for exotic materials including OLED and perovskite
- Specialty crystals for OLED
Related webinars
QCM use in the semiconductor industry for processes like ALD, E-beam, resistive source and sputtering.
Quartz crystal microbalance (QCM) technology has been used for decades to control deposition rate and thickness for the most complex processes seen in the ophthalmic, optical, display, and solar markets. INFICON has recently made a new advancement in QCM technology to address a problem seen across all of these industries related to QCM temperature effects. Thermal shock can cause QCM thickness errors which can decrease yield and increase manufacturing costs if temperature is not accounted for correctly.
Temperature impacts the frequency measurement and can create false mass readings. Thin film deposition controllers currently on the market have no good way of distinguishing frequency shifts related to mass from frequency shifts related to temperature, resulting in thickness errors and poor PID control. This can be detrimental to complex coating processes due to the low deposition rates and incredibly thin layers required. Thermal shocks can occur at any point in a deposition process and can cause unnecessary PID-loop corrections, triggering non-uniform deposition in respect to time. This means that the quality throughout the bulk of the material is inadequate. For very thin films, the thickness termination may not be at the real intended thickness because the process time window is small compared to the time allowed for a QCM to recover from a thermal shock event.
INFICON has patented a new temperature compensation technique for SC-cut crystals to remove the effects of temperature variation on the QCM without the need for additional hardware or custom and expensive sensors.
Please join us for the ‘Temperature Compensation for QCMs’ webinar, hosted by Sheldon Wayman, Product Engineer for INFICON Inc.
HP100 High Pressure SP-OES 제품은 1 ~ 450 Torr의 Process Pressure에서 사용할 수 있는 새로운 SP-OES 제품입니다.
Micro GC Fusion은 신속한 온도 램핑과 모듈식 아키텍처를 통해 상당한 처리량 향상을 제공합니다.
Residual Gas Analyzer는 실시간으로 진공 시스템의 공정을 관측하기에 용이한 센서입니다.
당사에서는 반도체/디스플레이 산업에서 박막 증착 공정에 균일성, 수율, 반복성 및 처리량을 향상하기 위한 필수적인 QCM(Quartz Crystal Microbalance)
Fabguard IPM (integrated process monitor) 는 Residual Gas Analyzer 를 조작하기 위한 강력한 프로그램 입니다.