Vacuum Feedthroughs
동축 피드스루 BNC MHV
INFICON은 특별한 요구사항에 맞춰 MIL-C-39012A에 기반한 BNC/MHV 동축 피드스루를nbsp;ISO-KF 및 CF-F 플랜지와 5가지 사양 범위에서 제공합니다.
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON은 특별한 요구사항에 맞춰 MIL-C-39012A에 기반한 BNC/MHV 동축 피드스루를nbsp;ISO-KF 및 CF-F 플랜지와 5가지 사양 범위에서 제공합니다.
장점
- MIL-C-39012A 기반
- 최대 5kV DC 전압
- 대기 커넥터 포함
- 2011/65/EU RoHS 준수
사양서
DN 16 ISO-KF BNC
DN 16 ISO-KF MHV
DN 16 CF-F BNC
DN 16 CF-F MHV
DN 40 CF-F MHV (3 Feedthroughs)
Type | DN 16 ISO-KF BNC | |
Vacuum connection | DN 16 ISO-KF | |
Number of feedthroughs | 1 | |
Voltage | ||
AC, 50 Hz | kV | 0.35 |
DC | kV | 0.5 |
Current | A | 3 |
Frequency | MHz | 150 |
Impedance | Ω | 50-60 |
Insulation resistance at 20°C | Ω | 1010 |
Tightness | mbar•L/s | 1 x 10-9 |
Pressure (absolute) (1) | 1 x 10-8 … 2.5 | |
Housing, flange, conductor | stainless steel | |
Feedthrough, seal | Al2O3 | |
Bakeout temperature | ||
With connector | °C | 50 |
Without connector | °C | 200 |
Standart connection | ||
Atmospheric connector | Atmospheric connector | UG 88/U |
Cable | Cable | RG 58/U |
Weight | kg | 0.1 |
(1) Pressure max. at 400 °C: 2 bar |
Type | DN 16 ISO-KF MHV | |
Vacuum connection | DN 16 ISO-KF | |
Number of feedthroughs | 1 | |
Voltage | ||
AC, 50 Hz | kV | 3.5 |
DC | kV | 5 |
Current | A | 3 |
Frequency | MHz | |
Impedance | Ω | |
Insulation resistance at 20°C | Ω | 1010 |
Tightness | mbar•L/s | 1 x 10-9 |
Pressure (absolute) (1) | 1 x 10-8 … 2.5 | |
Housing, flange, conductor | stainless steel | |
Feedthrough, seal | Al2O3 | |
Bakeout temperature | ||
With connector | °C | 50 |
Without connector | °C | 200 |
Standart connection | ||
Atmospheric connector | Atmospheric connector | UG 932/U |
Cable | Cable | RG 59/U |
Weight | kg | 0.1 |
(1) Pressure max. at 400 °C: 2 bar |
Type | DN 16 CF-F BNC | |
Vacuum connection | DN 16 CF-F | |
Number of feedthroughs | 1 | |
Voltage | ||
AC, 50 Hz | kV | 0.35 |
DC | kV | 0.5 |
Current | A | 3 |
Frequency | MHz | 150 |
Impedance | Ω | 50-60 |
Insulation resistance at 20°C | Ω | 1010 |
Tightness | mbar•L/s | 1 x 10-10 |
Pressure (absolute) (1) | 1 x 10-10 … 10 | |
Housing, flange, conductor | stainless steel | |
Feedthrough, seal | Al2O3 | |
Bakeout temperature | ||
With connector | °C | 50 |
Without connector | °C | 400 |
Standart connection | ||
Atmospheric connector | Atmospheric connector | UG 88/U |
Cable | Cable | RB 58/U |
Weight | kg | 0.14 |
(1) Pressure max. at 400 °C: 2 bar |
Type | DN 16 CF-F MHV | |
Vacuum connection | DN 16 CF-F | |
Number of feedthroughs | 1 | |
Voltage | ||
AC, 50 Hz | kV | 3.5 |
DC | kV | 5 |
Current | A | 3 |
Frequency | MHz | |
Impedance | Ω | |
Insulation resistance at 20°C | Ω | 1010 |
Tightness | mbar•L/s | 1 x 10-10 |
Pressure (absolute) (1) | 1 x 10-10 … 10 | |
Housing, flange, conductor | stainless steel | |
Feedthrough, seal | Al2O3 | |
Bakeout temperature | ||
With connector | °C | 50 |
Without connector | °C | 400 |
Standart connection | ||
Atmospheric connector | Atmospheric connector | UG 932/U |
Cable | Cable | RG 59/U |
Weight | kg | 0.14 |
(1) Pressure max. at 400 °C: 2 bar |
Type | DN 40 CF-F MHV (3 Feedthroughs) | |
Vacuum connection | DN 40 CF-F | |
Number of feedthroughs | 3 | |
Voltage | ||
AC, 50 Hz | kV | 3.5 |
DC | kV | 5 |
Current | A | 3 |
Frequency | MHz | |
Impedance | Ω | |
Insulation resistance at 20°C | Ω | 1010 |
Tightness | mbar•L/s | 1 x 10-10 |
Pressure (absolute) (1) | 1 x 10-10 … 10 | |
Housing, flange, conductor | stainless steel | |
Feedthrough, seal | Al2O3 | |
Bakeout temperature | ||
With connector | °C | 50 |
Without connector | °C | 400 |
Standart connection | ||
Atmospheric connector | Atmospheric connector | UG 932/U |
Cable | Cable | RG 59/U |
Weight | kg | 0.5 |
(1) Pressure max. at 400 °C: 2 bar |
파트 넘버
DN 16 CF-F BNC | |
214-155 | Coaxial feedthrough BNC |
DN 16 CF-F MHV | |
214-156 | Coaxial feedthrough MHV |
DN 16 ISO-KF BNC | |
214-151 | Coaxial feedthrough BNC |
DN 16 ISO-KF MHV | |
214-152 | Coaxial feedthrough MHV |
DN 40 CF-F MHV (3 Feedthroughs) | |
214-157 | Coaxial feedthrough MHV |