真空馈通及更多
旋转/直线运动馈入装置
嵌入式选项
与我们一起彻底改变您的真空计使用体验！
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
INFICON 的各种机械馈入装置为所有苛刻的应用提供了正确的设备，无论它是否适用于此，比如：在涂层应用室或实验室条件下的应用研究项目。
可用法兰设计 ISO-KF / ISO-K 和 CF 与我们的接头管对应。所有馈入件都适合用于泄漏速率不超过 1 x 10-9 mbarl/s 的真空系统。对于 UHV，还可提供全金属设计的馈入件。
好处
- 两个 FPM 轴密封件
- 直接推/拉和旋转启动
- 配备有锁环和可选防转装置
- 符合 2011/65/EU RoHS 标准
技术规格
FCH016-H
FCH025-H
FCH040-H
| Vacuum connection | DN 16 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 3 / Ø5mm | |
| Travel | mm | 50 |
| Shaft load | ||
| Radial force at max.travel | N | 10 |
| Torsion torque | N•m | 2 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.1 |
| Vacuum connection | DN 25 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 4 / Ø8mm | |
| Travel | mm | 100 |
| Shaft load | ||
| Radial force at max.travel | N | 15 |
| Torsion torque | N•m | 8 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.2 |
| Vacuum connection | DN 40 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 6 / Ø12mm | |
| Travel | mm | 150 |
| Shaft load | ||
| Radial force at max.travel | N | 30 |
| Torsion torque | N•m | 20 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.3 |
零件号
| FCH016-H | |
| 214-320 | FCH016-H Rotary/linear motion feedthrough |
| 214-072 | Anti-rotation device DN 16 |
| FCH025-H | |
| 214-322 | FCH025-H Rotary/linear motion feedthroughh |
| 214-073 | Anti-rotation device DN 25 |
| FCH040-H | |
| 214-324 | FCH040-H Rotary/linear motion feedthrough |
| 214-074 | Anti-rotation device DN 4 |
