真空馈通及更多
直线运动馈入装置
嵌入式选项
与我们一起彻底改变您的真空计使用体验！
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 的各种机械馈入装置为所有苛刻的应用提供了正确的设备，无论它是否适用于此，比如：在涂层应用室或实验室条件下的应用研究项目。
可用法兰设计 ISO-KF / ISO-K 和 CF 与我们的接头管对应。所有馈入件都适合用于泄漏速率不超过 1 x 10-9 mbarl/s 的真空系统。对于 UHV，还可提供全金属设计的馈入件。
好处
- 配有波纹管，可以满足更苛刻的真空要求
- 直接推/拉启动
- 使用测微螺丝进行高精度调节
- 2011/65/EU RoHS 符合
技术规格
FPU016-H
FPU040-H
FPU016-Z
FPU040-Z
| Type | FPU016-H | |
| Vacuum connection | DN 16 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M4x16mm | |
| Actuator | manual | |
| Travel | mm | 25 |
| Travel per revolution | mm | |
| Scale division | mm | 5 |
| Shaft load | ||
| Radial force at max. | N | 20 |
| Axial force vacuum | N | 85 |
| Axial force against atm | N | 100 |
| Torsion torque | N•m | 0.2 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.15 |
| Vacuum connection | DN 40 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M6x10mm, Ø10mm | |
| Actuator | manual | |
| Travel | mm | 50 |
| Travel per revolution | mm | |
| Scale division | mm | 10 |
| Shaft load | ||
| Radial force at max. | N | 100 |
| Axial force vacuum | N | 140 |
| Axial force against atm | N | 200 |
| Torsion torque | N•m | 0.5 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.75 |
| Vacuum connection | DN 16 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M4x16mm | |
| Actuator | micrometer screw | |
| Travel | mm | 20 |
| Travel per revolution | mm | 0.5 |
| Scale division | mm | 0.01 |
| Shaft load | ||
| Radial force at max. | N | 20 |
| Axial force vacuum | N | 185 |
| Axial force against atm | N | 200 |
| Torsion torque | N•m | 0.2 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | 100 |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.25 |
| Vacuum connection | DN 40 CF-R | |
| Feedthrough/seal | bellow | |
| Shaft connection | M6x10mm, Ø10mm | |
| Actuator | micrometer screw | |
| Travel | mm | 50 |
| Travel per revolution | mm | 1 |
| Scale division | mm | 0.005 |
| Shaft load | ||
| Radial force at max. | N | 100 |
| Axial force vacuum | N | 440 |
| Axial force against atm | N | 500 |
| Torsion torque | N•m | 0.5 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | ||
| Feedtrough | °C | 300 |
| Micrometer screw | °C | 100 |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 1 |
零件号
| FPU016-H | |
| 214-330 | FPU016-H Linear feedthrough DN 16 CF-R |
| FPU016-Z | |
| 214-334 | FPU016-Z Linear feedthrough DN 16 CF-R |
| FPU040-H | |
| 214-332 | FPU040-H Linear feedthrough DN 40 CF-R |
| FPU040-Z | |
| 214-336 | FPU040-Z Linear feedthrough DN 40 CF-R |
