冷阴极真空计
MAG470
倒置磁控真空计
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倒置磁控真空计MAG470适用于所有超高真空应用。测量范围为 5x10-11 mbar 到 1x10-2 mbar.
好处
- 无灯丝烧坏
- 扩展型版本, 传感器烘烤至 250°C
- 良好的点火属性
- 容易清洗
- 金属密封馈通
- 高压LED指示灯亮
- 对数模拟输出信号
典型应用
- 超高真空压力监测
- 蒸发和溅射系统的基本压力
- 中高真空范围内的一般真空测量和控制
规格
MAG470
MAG470 extended
| 测量范围 (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| 精确度 | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| 重复性 | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| 温度 | ||
| 操作 (ambient) | °C | +5 ... +55 |
| 储存 | °C | -40 ... +65 |
| 烘烤至 | °C | 250 1) |
| 电压供应 | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| 功率消耗 | W | ≤2 |
| 材料 | Stainless steel, Al2O3, Ag | |
| (1)无电子磁屏蔽 (2) 250°C在定义的区域中，请参见尺寸 (3) 电源的最小电压必须与传感器电缆的长度成比例地增加 | ||
| Measurement range (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| Accuracy | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| Repeatability | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| Temperature | ||
| Operation (ambient) | °C | +5 ... +55 |
| Storage | °C | -40 ... +65 |
| Bake-out | °C | 250 2) |
| Supply voltage | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | |
| (1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable | ||
订货信息
零件号
附件
备件
| MAG470 | |
| 零件号 | 描述 |
| 399-360 | MAG470 DN 40 CF-F, FCC |
| MAG470 扩展型 | |
| 零件号 | 描述 |
| 399-361 | MAG470 DN 40 CF-F, extendet |
| MAG470 | |
| Part Number | Description |
| 351-023 | Magnetic shield |
| MAG470 extended | |
| Part Number | Description |
| 351-023 | Magnetic shield |
| MAG470 | |
| Part Number | Description |
| 351-997 | MPG401 Maintenance set |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| MAG470 extended | |
| Part Number | Description |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| 351-997 | MPG401 Maintenance set |
