真空馈通及更多
旋转/直线运动馈入装置
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 的各种机械馈入装置为所有苛刻的应用提供了正确的设备，无论它是否适用于此，比如：在涂层应用室或实验室条件下的应用研究项目。
可用法兰设计 ISO-KF / ISO-K 和 CF 与我们的接头管对应。所有馈入件都适合用于泄漏速率不超过 1 x 10-9 mbarl/s 的真空系统。对于 UHV，还可提供全金属设计的馈入件。
好处
- 两个 FPM 轴密封件
- 直接推/拉和旋转启动
- 配备有锁环和可选防转装置
- 符合 2011/65/EU RoHS 标准
技术规格
FCH016-H
FCH025-H
FCH040-H
| Vacuum connection | DN 16 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 3 / Ø5mm | |
| Travel | mm | 50 |
| Shaft load | ||
| Radial force at max.travel | N | 10 |
| Torsion torque | N•m | 2 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.1 |
| Vacuum connection | DN 25 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 4 / Ø8mm | |
| Travel | mm | 100 |
| Shaft load | ||
| Radial force at max.travel | N | 15 |
| Torsion torque | N•m | 8 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.2 |
| Vacuum connection | DN 40 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M 6 / Ø12mm | |
| Travel | mm | 150 |
| Shaft load | ||
| Radial force at max.travel | N | 30 |
| Torsion torque | N•m | 20 |
| Tightness, static | mbar•L/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar ... 1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
| Weight | kg | 0.3 |
零件号
| FCH016-H | |
| 214-320 | FCH016-H Rotary/linear motion feedthroug |
| 214-072 | Anti-rotation device DN 16 |
| FCH025-H | |
| 214-322 | FCH025-H Rotary/linear motion feedthroug |
| 214-073 | Anti-rotation device DN 25 |
| 214-349 | FCH025-H Rotary/linear motion feedthroug |
| FCH040-H | |
| 214-324 | FCH040-H Rotary/linear motion feedthroug |
| 214-074 | Anti-rotation device DN 4 |
