真空馈通及更多
旋转馈入装置
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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NFICON 的各种机械馈入装置为所有苛刻的应用提供了正确的设备，无论它是否适用于此，比如：在涂层应用室或实验室条件下的应用研究项目。
可用法兰设计 ISO-KF / ISO-K 和 CF 与我们的接头管对应。所有馈入件都适合用于泄漏速率不超过 1 x 10-9 mbarl/s 的真空系统。对于 UHV，还可提供全金属设计的馈入件。
好处
- 波纹管密封
- 全金属版本
- 可满足各种苛刻的真空要求
- 符合 2011/65/EU RoHS 标准
技术规格
FRU016-H
FRU040-N
FRU040-L
| Vacuum connection | DN 16 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 4 |
| Transferable torque | ||
| Dynamic | N•m | 0.4 |
| Dynamic, at 300 °C | N•m | 0.2 |
| Static | N•m | 0.2 |
| Rotational speed | RPM | 200 |
| At max. torque | RPM | |
| Shaft load vacuum sided | ||
| Radial force | N | 10 |
| Axial force | N | 5 |
| Service life | Revolutions | 1 000 000 |
| Scale division | degree | 10 |
| Tightness | mbar•L/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Operating temperature | °C | 300 |
| Bakeout temperature | °C | 300 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 8 |
| Transferable torque | 4 | |
| Dynamic | N•m | 2 |
| Dynamic, at 300 °C | N•m | 3 |
| Static | N•m | 1000 |
| Rotational speed | RPM | 500 |
| At max. torque | RPM | |
| 60 | ||
| Shaft load vacuum sided | 20 | |
| Radial force | N | 2 000 000 |
| Axial force | N | – |
| Service life | Revolutions | 5 x 10-11 |
| Scale division | degree | 1 x 10-10 mbar ... 2 bar |
| Tightness | mbar•L/s | 300 |
| Pressure (absolute) | 300 | |
| Operating temperature | °C | 304L/1.4306, 304/1.4301, –/2.4360 |
| Bakeout temperature | °C | 1.5 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 12 |
| Transferable torque | 10 | |
| Dynamic | N•m | 2 |
| Dynamic, at 300 °C | N•m | 5 |
| Static | N•m | 500 |
| Rotational speed | RPM | 300 |
| At max. torque | RPM | |
| 100 | ||
| Shaft load vacuum sided | 30 | |
| Radial force | N | 1 000 000 |
| Axial force | N | – |
| Service life | Revolutions | 5 x 10-11 |
| Scale division | degree | 1 x 10-10 mbar ... 2 bar |
| Tightness | mbar•L/s | 300 |
| Pressure (absolute) | 300 | |
| Operating temperature | °C | 304L/1.4306, 304/1.4301, 303/1.4305 |
| Bakeout temperature | °C | 3 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
| Weight | kg | 0.3 |
零件号
| FRU016-H | |
| 214-310 | FRU016-H Rotary feedthrough DN 16 CF-F |
| FRU040-L | |
| 214-314 | FRU040-L Rotary feedthrough DN 40 CF-F |
| FRU040-N | |
| 214-312 | FRU040-N Rotary feedthrough DN 40 CF-F |
