Everything is smartly organized in one place.
process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer
- Run-by-run and real-time analysis for process control and fault finding reduces scrap and improves process control
- Automated data collection and storage for historical files to enhance SPC data combined from multiple sensors reduces hardware redundancy while allowing all data from an entire tool, process or fab to be integrated for convenient access and analysis
- Single user interface for all tool data reduces learning curve
one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases
- FabGuard Explorer 提供多传感器支持：Transpector MPH RGA、Transpector 2 RGA、RFS100 射频传感器和 Quantus 气体分析仪
Helps Semiconductor, Display and Solar manufacturers meet these challenges by providing central archival and management of process equipment recipes.
- Custom tool messaging as required by specific tool types
- Central repository for process recipes
- The same golden recipe can be shared across tools/chambers
- Automated or manual recipe verification
Advanced Modeling, Data Analysis and Visualization Capabilities Made Simple