了解更多关于我们的产品和服务
Mastering Vacuum Measurements:
A Basic Guide to Capacitive Vacuum Gauges
About the webinar
In our INFICON ACADEMY Webinar you will learn about INFICON's capacitive diaphragm gauges. Join us to gain insights into their working principles, structure, and functionality.
Our specialist Marc Strauss will explain the diverse models INFICON offers and discuss how they align with and enhance your operational needs. Furthermore, he will provide valuable information on the various configuration options available, as well as highlight typical areas of application.
Don't miss this opportunity to deepen your understanding of INFICON's technology.
Related webinars
Basic knowledge explained easy and practice-oriented
How to determine and ensure the permissible leak tightness of your product
Intelligent solution for real-time vacuum gas monitoring
Easy with the new Sentrac Leak Detector
In this webinar we will discuss some common applications in the optical, OLED, and solar industry. We will unpack a list of unique key features exclusively offered by INFICON that are tailored to your application
Our new Gas Analyzer. Product introduction, availability, successful implementations of pre-production systems
Technical consideration of a test leak, test leak applications, Certifications
Easy and efficient hydrogen sniffing leak testing
QCM use in the semiconductor industry for processes like ALD, E-beam, resistive source and sputtering.
Quartz crystal microbalance (QCM) technology has been used for decades to control deposition rate and thickness for the most complex processes seen in the ophthalmic, optical, display, and solar markets. INFICON has recently made a new advancement in QCM technology to address a problem seen across all of these industries related to QCM temperature effects. Thermal shock can cause QCM thickness errors which can decrease yield and increase manufacturing costs if temperature is not accounted for correctly.
Temperature impacts the frequency measurement and can create false mass readings. Thin film deposition controllers currently on the market have no good way of distinguishing frequency shifts related to mass from frequency shifts related to temperature, resulting in thickness errors and poor PID control. This can be detrimental to complex coating processes due to the low deposition rates and incredibly thin layers required. Thermal shocks can occur at any point in a deposition process and can cause unnecessary PID-loop corrections, triggering non-uniform deposition in respect to time. This means that the quality throughout the bulk of the material is inadequate. For very thin films, the thickness termination may not be at the real intended thickness because the process time window is small compared to the time allowed for a QCM to recover from a thermal shock event.
INFICON has patented a new temperature compensation technique for SC-cut crystals to remove the effects of temperature variation on the QCM without the need for additional hardware or custom and expensive sensors.
Please join us for the ‘Temperature Compensation for QCMs’ webinar, hosted by Sheldon Wayman, Product Engineer for INFICON Inc.