Vacuum Feedthroughs & More
Rotary Feedthrough

Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.
Advantages
- For transmitting high torque
- With FPM shaft seal and ball bearings
- 2011/65/EU RoHS compliant
Specifications
FRH016-H
FRH025-H
FRH040-H
FRH063-H
Type | FRH016-H | |
Vacuum connection | DN 16 ISO-KF | |
Feedthrough/seal | FPM | |
Shaft measure | mm | Ø5 |
Transferable torque | nm | 1.5 |
Rotational speed (1) | RPM | 1500 |
Idling torque under vacuum | N•cm | ≤ 3 |
Starting torque under vacuum | N•cm | ≤ 6 |
Shaft load vacuum sided | ||
Radial force | N | 60 |
Axial force | N | 30 |
Service life | Revolutions | 20 000 000 |
Tightness, static | mbar•L/s | 1 x 10-9 |
Pressure (absolute) | 1 x 10-9 mbar ... 1 bar | |
Operating temperature | °C | 50 |
Bakeout temperature | °C | 110 |
Materials exposed to process media | stainless steel 420/1.4021, aluminum 6082, elastomer FPM | |
Weight | kg | 0.1 |
(1) When a reduced service life is acceptable, the rotational can be increased by up to a factor of two | ||
(2) relevant to DN63 ISO-K: | ||
Centering ring not included in delivery, CR aluminum Part No. 212-251 / FPM Stainless steel Part No. 212-281 . |
Type | FRH025-H | |
Vacuum connection | DN 25 ISO-KF | |
Feedthrough/seal | FPM | |
Shaft measure | mm | Ø8 |
Transferable torque | nm | 6 |
Rotational speed (1) | RPM | 1000 |
Idling torque under vacuum | N•cm | ≤ 4 |
Starting torque under vacuum | N•cm | ≤ 8 |
Shaft load vacuum sided | ||
Radial force | N | 150 |
Axial force | N | 50 |
Service life | Revolutions | 20 000 000 |
Tightness, static | mbar•L/s | 1 x 10-9 |
Pressure (absolute) | 1 x 10-9 mbar ... 1 bar | |
Operating temperature | °C | 50 |
Bakeout temperature | °C | 110 |
Materials exposed to process media | stainless steel 420/1.4021, aluminum 6082, elastomer FPM | |
Weight | kg | 0.2 |
(1) When a reduced service life is acceptable, the rotational can be increased by up to a factor of two | ||
(2) relevant to DN63 ISO-K: | ||
Centering ring not included in delivery, CR aluminum Part No. 212-251 / FPM Stainless steel Part No. 212-281 . |
Type | FRH040-H | |
Vacuum connection | DN 40 ISO-KF | |
Feedthrough/seal | FPM | |
Shaft measure | mm | Ø12 |
Transferable torque | nm | 25 |
Rotational speed (1) | RPM | 750 |
Idling torque under vacuum | N•cm | ≤ 5 |
Starting torque under vacuum | N•cm | ≤ 10 |
Shaft load vacuum sided | ||
Radial force | N | 250 |
Axial force | N | 60 |
Service life | Revolutions | 20 000 000 |
Tightness, static | mbar•L/s | 1 x 10-9 |
Pressure (absolute) | 1 x 10-9 mbar ... 1 bar | |
Operating temperature | °C | 50 |
Bakeout temperature | °C | 110 |
Materials exposed to process media | stainless steel 420/1.4021, aluminum 6082, elastomer FPM | |
Weight | kg | 0.6 |
(1) When a reduced service life is acceptable, the rotational can be increased by up to a factor of two | ||
(2) relevant to DN63 ISO-K: | ||
Centering ring not included in delivery, CR aluminum Part No. 212-251 / FPM Stainless steel Part No. 212-281 . |
Type | FRH063-H | |
Vacuum connection | DN 63 ISO-KF | |
Feedthrough/seal | FPM | |
Shaft measure | mm | Ø20 |
Transferable torque | nm | 100 |
Rotational speed (1) | RPM | 500 |
Idling torque under vacuum | N•cm | ≤ 10 |
Starting torque under vacuum | N•cm | ≤ 20 |
Shaft load vacuum sided | ||
Radial force | N | 500 |
Axial force | N | 100 |
Service life | Revolutions | 10 000 000 |
Tightness, static | mbar•L/s | 1 x 10-9 |
Pressure (absolute) | 1 x 10-9 mbar ... 1 bar | |
Operating temperature | °C | 50 |
Bakeout temperature | °C | 110 |
Materials exposed to process media | stainless steel 420/1.4021, aluminum 6082, elastomer FPM | |
Weight | kg | 2 |
(1) When a reduced service life is acceptable, the rotational can be increased by up to a factor of two | ||
(2) relevant to DN63 ISO-K: | ||
Centering ring not included in delivery, CR aluminum Part No. 212-251 / FPM Stainless steel Part No. 212-281 . |
Part Number
FRH016-H | |
214-300 | FRH016-H Rotary feedthrough DN 16 ISO-KF |
FRH025-H | |
214-302 | FRH025-H Rotary feedtrough DN 25 ISO-KF |
FRH040-H | |
214-304 | FRH040-H Rotary feedtrough DN 40 ISO-KF |
214-347 | FRH040-H Rotary feedtrough DN 40 ISO-KF |
FRH063-H | |
214-306 | FRH063-H Rotary feedthrough DN 63 ISO-K |
Downloads
3D Step Files
FRH016-H
zip
•
23,6 KB
•
German, Japanese, Korean, Spanish, Chinese, English
FRH025-H
zip
•
24,2 KB
•
German, Japanese, Korean, Spanish, Chinese, English
FRH040-H
zip
•
27,1 KB
•
German, Japanese, Korean, Spanish, Chinese, English
FRH063-H
zip
•
26,5 KB
•
German, Japanese, Korean, Spanish, Chinese, English