STM-2XM

STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price.

STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors.

Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1).

Feature Packed

STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments.

Programmable features include shutter delay, time/power monitoring, and rate sampling. Use all of these features to achieve the most accurate readings and the longest crystal life.

Operate and monitor STM-2XM either through the simple front panel interface or through the included LabVIEW^® software. This simple software is fully functional and easy to use.

Easy to Use

STM-2XM features a high contrast LCD display and intuitive menu system. On-screen hints can be found throughout the menus for simple, guided programming and operation. The easy-to-read LCD can display in accumulated mass or thickness.

Specifications

Sensor inputs	2

Measurement frequency range	6.0 to 5.0 MHz (fixed)

Thickness and rate resolution/measurement	±0.037 Å @ tooling/density = 100/1, fundamental frequency = 6 MHz

Stored films	15

Digital inputs	8

Digital outputs	8

Accessories

Part Numbers

Accessories

Accessories and Replacement Parts

Consumables

Part Number	Description
STM-2XM-G1	STM-2XM Monitor, US power cord
STM-2XM-G2	STM-2XM Monitor, European power cord

Name	Description
Easy Rate Single Sensor	Easy Rate Single Sensor
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Low Profile Single Sensor	Low Profile Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
Low Profile Dual Sensor	Low Profile Dual Sensor
UHV Bakeable Sensor	UHV Bakeable Sensor
ALD Sensor	ALD Sensor
Sputtering Sensor	Sputtering Sensor

Part Number	Description
783-014-009	Dual rack mount kit - Mounts two STM-2XM instruments in a 48.3 cm (19 in.) rack
Oscillator kits	(Includes oscillator and cables)
783-500-109-10	3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25	7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50	15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75	22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only	(No cables included)
783-500-013-G1	OSC-100 oscillator only (no cables)
Cables
782-902-011	15.2 cm (6 in.) BNC cable, male/female
782-902-012-10	3 m (10 ft.) BNC cable, male/male
782-902-012-25	7.6 m (25 ft.) BNC cable, male/male
782-902-012-50	15.2 m (50 ft.) BNC cable, male/male
782-902-012-75	22.8 m (75 ft.) BNC cable, male/male