STM-2XM
2-Channel Rate/Thickness Monitor
Product configurator
Gemini™ MxG5xx
STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price.
STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors.
Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1).
Feature Packed
STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments.
Programmable features include shutter delay, time/power monitoring, and rate sampling. Use all of these features to achieve the most accurate readings and the longest crystal life.
Operate and monitor STM-2XM either through the simple front panel interface or through the included LabVIEW® software. This simple software is fully functional and easy to use.
Easy to Use
STM-2XM features a high contrast LCD display and intuitive menu system. On-screen hints can be found throughout the menus for simple, guided programming and operation. The easy-to-read LCD can display in accumulated mass or thickness.
Features
- Two measurement channels
- Four analog outputs for rate, rate deviation, or thickness
- Eight programmable digital inputs
- Eight programmable digital outputs
- High accuracy at 10 readings per second
- Displays mass or thickness
- Codeposition monitoring capabilities
Typical Applications
- Single/dual sensor monitoring
- Codeposition monitoring
Specifications
| Sensor inputs | 2 |
| Measurement frequency range | 6.0 to 5.0 MHz (fixed) |
| Thickness and rate resolution/measurement | ±0.037 Å @ tooling/density = 100/1, fundamental frequency = 6 MHz |
| Stored films | 15 |
| Digital inputs | 8 |
| Digital outputs | 8 |
Accessories
| Part Number | Description |
| STM-2XM-G1 | STM-2XM Monitor, US power cord |
| STM-2XM-G2 | STM-2XM Monitor, European power cord |
| Name | Description |
| Easy Rate Single Sensor | Easy Rate Single Sensor |
| Front Load Single Sensor | Front Load Single Sensor |
| Front Load Dual Sensor | Front Load Dual Sensor |
| Cool Drawer Single Sensor | Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
| Low Profile Single Sensor | Low Profile Single Sensor |
| Easy Rate Dual Sensor | Easy Rate Dual Sensor |
| Low Profile Dual Sensor | Low Profile Dual Sensor |
| UHV Bakeable Sensor | UHV Bakeable Sensor |
| ALD Sensor | ALD Sensor |
| Sputtering Sensor | Sputtering Sensor |
| Part Number | Description |
| 783-014-009 | Dual rack mount kit - Mounts two STM-2XM instruments in a 48.3 cm (19 in.) rack |
| Oscillator kits | (Includes oscillator and cables) |
| 783-500-109-10 | 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable |
| 783-500-109-25 | 7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable |
| 783-500-109-50 | 15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable |
| 783-500-109-75 | 22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable |
| Oscillator Only | (No cables included) |
| 783-500-013 | OSC-100 oscillator only (no cables) |
| Cables | |
| 782-902-011 | 15.2 cm (6 in.) BNC cable, male/female |
| 782-902-012-10 | 3 m (10 ft.) BNC cable, male/male |
| 782-902-012-25 | 7.6 m (25 ft.) BNC cable, male/male |
| 782-902-012-50 | 15.2 m (50 ft.) BNC cable, male/male |
| 782-902-012-75 | 22.8 m (75 ft.) BNC cable, male/male |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
