Type A Sensor
Automatic Crystal Switching Maximizes Production Time
The low-density materials and low deposition rates associated with OLED processes demand extraordinary accuracy and reliability from thin film deposition controllers and sensors. To maintain rate and thickness accuracy, continuous rate control is necessary.
The Type A sensor is available in a 5-crystal, 10-crystal, or 12-crystal deposition monitor transducer.
To minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.
You will get the greatest benefit from the Motorized Crystal Sensor when you use it with the INFICON Cygnus® 2 thin film deposition controller. Cygnus 2 is the only thin film controller designed specifically for OLED manufacturing. Up to six sources can be controlled simultaneously, independently, or in any combination, so users can maximize throughput for the most complex, demanding, and unique OLED applications.
Advantages
- Holds crystals with robust, automatic switching to maximize process uptime
- Smallest size in its class
- Easy-to-remove carousel allows fast replacement of all crystals
- Front deposition shield protects crystals and carousel from material accumulation; easy removal minimizes the need to remove entire sensor for maintenance
- Stepping motor offers precise position control of crystals
- Motor drivers for carousel and chopper are included
Specifications
| Maximum operating environment temperature | 250°C (at the carousel cover) |
| Power supply voltage for operating motors | 24 V (DC) (stepping motor drivers included for carousel and chopper) |
| Water flow | Ø6 mm PTFE tube, minimum 1.0–1.5 L/min, average temperature 18–20ºC |
| Air flow | Ø6 mm PTFE tube, minimum 0.2–0.5 MPa |
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The product is used in the following markets
