Powerful Yet Compact Solutions for Deployment of FabGuard
Flange connection to vacuum chamber
Analog output signal
DN 16 ISO-KF
1.2 - 8.68 V
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FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.
INFICON solution for FabGuard deployment
Powerful enough to run the FabGuard suite of products
Capable of supporting INFICON sensors and third-party sensors
Small footprint for ease of installation
High reliability fanless industrial controller
High capacity hard drive for extended data storage