FabGuard® Controllers

Powerful Yet Compact Solutions for Deployment of FabGuard

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.

Features

  • INFICON solution for FabGuard deployment
  • Powerful enough to run the FabGuard suite of products
  • Capable of supporting INFICON sensors and third-party sensors
  • Small footprint for ease of installation
  • High reliability fanless industrial controller
  • High capacity hard drive for extended data storage
  • Optional data acquisition boards

Specifications

TypeIndustrial Form FactorIndustrial Form Factor 2Industrial Form Factor 6 PortIndustrial Form Factor 6 Port OPC
Size (Length)8.9 inches8.9 inches8.9 inches8.9 inches
Size (Width)9.5 inches9.5 inches9.5 inches9.5 inches
Size (Height)3.6 inches3.6 inches3.6 inches3.6 inches
CPUi5-6500TEi5-6500TEi5-6500TEi5-6500TE
Memory8 GB8 GB8 GB8 GB
Hard Disk500 GB1 TB1 TB1 TB
Operating SystemWindows 7 Professional, 64-bitWindows 7 Professional, 64-bitWindows 7 Professional, 64-bitWindows 7 Professional, 64-bit
Ethernet2 x GbE LAN2 x GbE LAN6 x GbE LAN6 x GbE LAN
Other   OPC Server

The product is used in the following markets

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