FabGuard® Controllers

Powerful Yet Compact Solutions for Deployment of FabGuard

Product configurator

Gemini™ MxG5xx

Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
Gemini™ MxG5xx
Switching functions
Electrical Connection
FCC, 8-pin
Digital Interface
Measurement range
1.2 - 8.68 V
Personal information
Gemini™ MxG5xx
Gemini™ MAG500
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FabGuard Controllers provide powerful compact solutions for deploying FabGuard integrated process monitoring solutions. These reliable industrial controllers connect with tools and sensors through FabGuard to perform real-time data acquisition and analysis, whether for detailed chamber-specific analysis or as part of a fabwide SPC & FDC system. FabGuard Controllers support INFICON sensors, third-party sensors as well as the variety of tools found throughout fabs. Even the demanding requirements of high-speed applications can be met using the FabGuard High Speed Controller.


  • INFICON solution for FabGuard deployment
  • Powerful enough to run the FabGuard suite of products
  • Capable of supporting INFICON sensors and third-party sensors
  • Small footprint for ease of installation
  • High reliability fanless industrial controller
  • High capacity hard drive for extended data storage
  • Optional data acquisition boards


TypeIndustrial Form FactorIndustrial Form Factor 2Industrial Form Factor 6 PortIndustrial Form Factor 6 Port OPC
Size (Length)8.9 inches8.9 inches8.9 inches8.9 inches
Size (Width)9.5 inches9.5 inches9.5 inches9.5 inches
Size (Height)3.6 inches3.6 inches3.6 inches3.6 inches
Memory8 GB8 GB8 GB8 GB
Hard Disk500 GB1 TB1 TB1 TB
Operating SystemWindows 7 Professional, 64-bitWindows 7 Professional, 64-bitWindows 7 Professional, 64-bitWindows 7 Professional, 64-bit
Ethernet2 x GbE LAN2 x GbE LAN6 x GbE LAN6 x GbE LAN
Other   OPC Server

The product is used in the following markets

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