皮拉尼真空计
PSG50x
大气压至中真空真空计
嵌入式选项
与我们一起彻底改变您的真空计使用体验！
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
INFICON Pirani 标准真空计 PSG500、PSG502-S、PSG510-S 和 PSG512-S 采用当今市场上最先进的数字 Pirani 技术，不锈钢传感器单元坚固耐用，结构设计紧凑，适用于半导体系统和标准应用，例如前级真空管。
好处
- 轻松一键调节 ATM 和 HV
- 节省空间的坚固设计
- 铝质壳体
- 可安装在任何方向
- 不锈钢测量单元，带金属密封馈入装置
- 对数信号输出，易于集成
- 螺纹接头，具有 10 bar 绝对过压能力
- 250°C 可烘烤装置
- 镍丝选件，适用于腐蚀性应用
- 陶瓷馈入装置，适用于腐蚀性极强的应用（PSG510 和 PSG512)
- 可选设定点
- 符合 RoHS 标准
典型应用
- 高真空电离真空计控制
- 前级真空压力监控
- 真空系统中的安全电路
- 高真空和低真空范围内的一般真空测量和控制
规格
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | ‒ |
| Hysteresis | % of reading | ‒ |
| Relay contact | ‒ | |
| Relay contact: Switching time | ms | ‒ |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
Part Number
Accessories
Spare Parts
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8" NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2" Tube |
| 350-064 | PSG500 8-VCR (1/2") |
| 350-065 | PSG500 4-VCR (1/4") |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8" NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2" Tube |
| 350-084 | PSG500-S 8-VCR (1/2") |
| 350-085 | PSG500-S 4-VCR (1/4") |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8" NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2" Tube |
| 350-144 | PSG502-S 8-VCR (1/2") |
| 350-145 | PSG502-S 4-VCR (1/4") |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
| PSG500 tungsten | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500-S tungsten, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG502-S nickel, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500 tungsten | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG500-S tungsten, setpoints | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG502-S nickel, setpoints | |
| 350-900 | PSG502 Spare Sensor DN 16 KF |
| 350-901 | PSG502 Spare Sensor 1/8" NPT |
| 350-902 | PSG502 Spare Sensor DN 16 CF-R |
| 350-903 | PSG502 Spare Sensor 1/2" Tube |
| 350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
| 350-905 | PSG502 Spare Sensor 7/16-20 UNF |
| 350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
| 350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
| 350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-930 | PSG510 Spare Sensor DN 16 KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-940 | PSG512 Spare Sensor DN 16 KF |
下载
手册
3D文件
350-060 PSG500 DN 16 ISO-KF
zip
•
195,3 KB
•
3D文件
350-061 PSG500 1/8" NPT
zip
•
271,2 KB
•
3D文件
350-062 PSG500 DN 16 CF-R
zip
•
284,1 KB
•
3D文件
350-063 PSG500 1/2" tube
zip
•
265,9 KB
•
3D文件
350-064 PSG500 8 VCR®
zip
•
279,6 KB
•
3D文件
350-065 PSG500 4 VCR®
zip
•
278,4 KB
•
3D文件
350-066 PSG500 7/16-20 UNF
zip
•
277,9 KB
•
3D文件
350-067 PSG500 DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D文件
350-068 PSG500 DN 16 CF-R long tube
zip
•
295,4 KB
•
3D文件
350-072 PSG500 G1/8"
stp
•
2,2 MB
•
3D文件
350-080 PSG500-S DN 16 ISO-KF
zip
•
319,0 KB
•
3D文件
350-081 PSG500-S 1/8" NPT
zip
•
342,8 KB
•
3D文件
350-082 PSG500-S DN 16 CF-R
zip
•
355,3 KB
•
3D文件
350-083 PSG500-S 1/2" tube
zip
•
337,7 KB
•
3D文件
350-084 PSG500-S 8 VCR®
zip
•
351,4 KB
•
3D文件
350-085 PSG500-S 4 VCR®
zip
•
350,3 KB
•
3D文件
350-086 PSG500-S 7/16-20 UNF
zip
•
349,7 KB
•
3D文件
350-087 PSG500-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D文件
350-088 PSG500-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D文件
350-140 PSG502-S DN 16 ISO-KF
zip
•
295,4 KB
•
3D文件
350-141 PSG502-S 1/8" NPT
zip
•
342,8 KB
•
3D文件
350-142 PSG502-S DN 16 CF-R
zip
•
355,3 KB
•
3D文件
350-143 PSG502-S 1/2" tube
zip
•
337,7 KB
•
3D文件
350-144 PSG502-S 8 VCR®
zip
•
351,4 KB
•
3D文件
350-145 PSG502-S 4 VCR®
zip
•
350,3 KB
•
3D文件
350-146 PSG502-S 7/16-20 UNF
zip
•
349,7 KB
•
3D文件
350-147 PSG502-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D文件
350-148 PSG502-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D文件
