质谱仪
Transpector® CPM 3
快速、现场就绪过程监测系统
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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性能、可靠性和通用性
十多年来，INFICON Transpector CPM 一直是半导体行业市场领先的残余气体分析仪 (RGA) 过程监测系统。现在，Transpector CPM 3 通过集成经实践验证的泵送和进口系统与新型传感器和电子元件，达到业内领先的测量速度和灵敏度。Transpector CPM 3 是新型和现有半导体过程（例如，ALD、CVD、PVD 和蚀刻）的理想 RGA 过程监控器。
Transpector CPM 3 通过以下特性为合作伙伴提供经实践证实的投资回报率：
- 业内领先的测量技术
- 稳健的适应性架构
- 易于维护
- 出色的产品支持
功能
- ALD、蚀刻、CVD 和 300 mm 除气残余气体分析仪 — 实现实时过程监测和分析
- ALD 就绪，测量速度为每点 1.8 ms（每秒 555 点）
- 在大多数苛刻 CVD 和蚀刻应用中，展现出经实践验证的耐久性和可靠性
- 应用集成 — Transpector CPM 集成 FabGuard 软件，由 INFICON 世界级应用专家提供支持，是一款强大的过程监测与诊断工具
- 紧凑尺寸 — 允许轻松集成到半导体生产设备
- Hexblock™ 含三个压力进口并减少表面积，以最小化表面反应时间和响应时间
- 电容隔膜计 (CDG) — CDG 允许用户监测过程压力，并自动保护系统不出现压力偏移
- 自动校准 — 确保长期数据稳定性和精度，以便进行各传感器和工具的腔室匹配
技术规格
100 AMU CPM
200 AMU CPM
300 AMU CPM
| 总压力范围 | 5E-7 - 1E-3 Torr |
| 检测限值 | < 1 ppm |
| 系统工作压力 | 1E-8 Torr - 1.2 atm |
| 灵敏度（低发射） | > 4E-6 Amps/Torr |
| 灵敏度（高发射） | > 2E-5 Amps/Torr |
| 总压力范围 | 5E-7 - 1E-3 Torr |
| 检测限值 | < 2 ppm |
| 系统工作压力 | 1E-8 Torr - 1.2 atm |
| 灵敏度（低发射） | > 2E-6 Amps/Torr |
| 灵敏度（高发射） | > 1E-5 Amps/Torr |
| 总压力范围 | 5E-7 - 1E-3 Torr |
| 检测限值 | < 4 ppm |
| 系统工作压力 | 1E-8 Torr - 1.2 atm |
| 灵敏度（低发射） | > 1E-6 Amps/Torr |
| 灵敏度（高发射） | > 5E-6 Amps/Torr |
耗材
100 AMU CPM
200 AMU CPM
300 AMU CPM
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
| 300 AMU CPM | |
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
备件
100 AMU CPM
200 AMU CPM
300 AMU CPM
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
